Stainless Steel Thermal Process Cassettes
This cassette is made for high-temperature wafer processing applications or specialty applications, including mega-sonic and cleaning processes. This all-welded type 316 stainless steel electro-polished cassette has outside dimensions similar to SEMI standard plastic process cassettes. SSC cassettes are transfer and automation compatible. Corrosion Resistance: 316SST offers better resistance than 302 and 304 SST; resists many industrial chemicals and solvents including: sodium and calcium brines, hypo chlorite solutions, phosphoric acid, sulfite liquors, and sulfurous acids.
Product
Description
Industry standard open side wall high temperature 25-slot all-welded stainless steel metal cassettes used in semiconductor manufacturing operations. Typically used for high thermal processes, polyimide bake, and for ultrasonic cleaning applications. Designed for ISO Class 3 (FS209E Class 1) Thermal environments up to 550° C
H-Square uses a Return Material Authorization (RMA) process. If you need to return a product, contact us at info@h-square.com to receive an RMA number. Please state name, product part number and reason for return. Once you receive the RMA number, ship the product back to H-Square. Customer is responsible for shipping costs to return product.
- If the product is being returned under warranty as defective, it will be repaired or replaced at no charge after evaluation.
- If product is being returned unused and unopened within 30 days, a full refund will be offered, less original shipping charges.
- If the product is being returned used within 30 days, product will be evaluated for condition and customer refunded accordingly.
- Products over 30 days cannot be returned for refund.