Open End Wall Cassette
|Wafer Size||76, 100, 150, 200|
|Dimensions||8.5 × 8 × 8.5 in|
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Conventional 25-slot aluminum metal cassettes used in semiconductor manufacturing operations. Typically used in areas where wafer positioning is important or where elevated temperatures cause warping to other carriers. Features open end wall, PTFE wafer stops and hard clear (HC) anodization surface finish for abrasion resistance and longevity. Designed for ISO Class 3 (FS209E Class 1). Thermal environments up to 250° C
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