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Call: 408.982.9108
Fax: 408.982.9183
SKU: WS200


A stand-alone tabletop automation system features two-cassette stage configuration. A cost-effective automation tool designed to reduce wafer breakage and scratches. Compatible with industry standard shipping, process, and metal cassettes. Provides a highly flexible control system that any operator can use with minimal training.

The tool is operated from a touch screen display.  Operators load the cassettes onto the stage.  To move wafers between cassettes, the operator can choose one of the three available modes:

• Manual Mode
• Quick Transfer Mode
• Recipe Mode

A safe vacuum-less low-contact end-effector includes a wafer mapping sensor that maps wafer locations in each cassette and detects wafer presence for accurate movements.


  • SECS/GEM Tool Interface
  • Integrated OCR Automated
  • Pre-Aligner


• Single wafer transfer
• Lot split transfer
• Merge applications
• Pitch change applications
• "Fill" loading/removing test wafers from a parent lot
• Scratch reduction by eliminating manual wafer handling
• Combining wafer lots/splitting lots/odd-even
• Thin wafer handling (up to 2mm warpage)
• MEMS or Taiko® (wafer edge end-effector option)

Wafer Size100mm- 200mm
Power Requirements24VDC 3 Amps 120VAC to 24VDC Power Supply Specify when order
Shipping Info

Additional information

Shipping Weight 225 lbs
Dimensions 38 × 33 × 42 in
Wafer Size

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Shipping Policy
Return Policy
Shipping Restrictions

H-Square will ship the product to the customer using FedEx. Cost will be calculated using the FedEx website. H-Square does not charge an additional handling fee. If product is in inventory it will be shipped within 3 business days. If it is not in inventory, customer will be notified of the shipping date.

H-Square uses a Return Material Authorization (RMA) process. If you need to return a product, contact us at info@h-square.com to receive an RMA number. Please state name, product part number and reason for return. Once you receive the RMA number, ship the product back to H-Square. Customer is responsible for shipping costs to return product.

  1. If the product is being returned under warranty as defective, it will be repaired or replaced at no charge after evaluation.
  2. If product is being returned unused and unopened within 30 days, a full refund will be offered, less original shipping charges.
  3. If the product is being returned used within 30 days, product will be evaluated for condition and customer refunded accordingly.
  4. Products over 30 days cannot be returned for refund.
H-Square warranties their products for one year from date of sale. This warranty does not cover wear and tear from normal use.
US State Department restricts shipping to certain countries. If shipping outside of USA, the order will be reviewed before shipment.
H-Square will charge applicable sales tax if required by the State of California
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