Single Wafer Transfer
Economical, automatic single wafer transfer systems. Engineered for production, metrology, R&D, test-assembly packaging, and application labs to move wafers between two SEMI compliant processes, shipping, or metal cassettes. The Wafer Mover offers a simple, safe method for transferring single wafers between two cassettes in a RECIPE or MANUAL mode of operation. A wafer mapping end-eff ector scans each cassette and detects wafers for safe and accurate wafer movements.
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