Manual Handling

Performance

Our customers want tools that offer excellent value for money – not cheap tools but ones of high quality at a good price.

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Vacuum Wands

Vacuum wands are available as a house-facilities vacuum installed setup (tip + wand + coil cord + holder + ground adapter), or as a portable battery operated Freedom Wand providing the flexibility to go anywhere in the fab and to be used for wafer rescue applications. Vacuum wand tips are available in two materials - Antistatic PEEK, or Antistatic PEEK with a UHMW touchpad. Both materials are off ered as straight (most common) or in a 45° off set orientation.

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Bernoulli Wands

H-Square Breeze provides a state-of-the-art touchless solution for manually transferring wafers while introducing little to no stress to the substrate. The Breeze wand is a noncontact wafer handling system that employs Bernoulli lift attraction principles. Ideal for wafer handling of thin, warped, thick, SEMI standard, or many other sizes substrates with special features such as etched cavities, Taiko© and TSV wafers.

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Wafer Edge Grip Picks

H-Square wafer picks are ergonomic, constant force, fully mechanical tools providing fab operators clean, scratch-free handling of wafers. Advanced materials are incorporated in the designs for chemical resistance, ESD-safety control, lower abrasion and less tool maintenance. Wafer picks can be used for general wafer handling or for wafer rescue applicaitons.

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Photomask Picks

H-Square’s line of photomask picks is the result of years of work with semiconductor companies and mask shops to provide a non-contaminaing secure means of handling photomasks. Picks can reduce contamination by eliminating direct contact of mask by operator’s hands. With the stringent cleanliness requirements for sub-micron applications today, mask picks have become indispensable. Advanced materials are incorporated in the designs for ESD-safety control, lower abrasion and less tool maintenance.

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Bulk Wafer Aligners

EZ Guide™ wafer aligners provide a fast, clean, accurate method of batch alignment of wafers to any angle. Engineered for both accurate wafer placement and for lot-integrity verifi cation applications. Models are constructed with advanced ESDsafe materials, open design laminar fl ow stages and feature a quick disconnect roller assembly for easy cleaning and maintenance.

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Bulk Wafer Transfers

The LCT series transfers are the most advanced, reliable and fastest method for transferring standard or fragile wafers between two cassettes. The 300mm version is compatible with all industry standard FOUP, FOSB and SEMI compliant metal and plastic open cassettes.

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Wafer Presenters

H-Square wafer presenter tools are are engineered for fab operators to access wafers in a cassette for safer handling or macro-inspection applications. These tools greatly reduce wafer scratching and particle contamination on the wafers. Advanced materials are incorporated in the designs for ESD-safety control, lower abrasion and less tool maintenance. Wafer presenter tools are compatible with most industry SEMI compliant wafer cassettes.

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Wafer Escalators

Table top manual wafer escalator. Escalates wafers 0.200» steps for ID mark reading. Costeff ective design provides full-lot wafer tracking at a fraction of the cost of fully automated OCR systems.

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RSP/SMIF Pod Openers

Tabletop manual swing arm pod opener provides clean, easy access to wafers or photomasks in any M200 or RSP200 reticle storage pod. The SMIFMAN8 allows the operator to manually open the center mechanism on the pod, lowering the base and releasing the lid. This allows access to the inner cassette or mask tray. H-Square’s design features a clean low-contact pin raised storage area for the lid to be stored while pod is open. Antistatic materials are used to insure ESD safety and cleanliness.

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FOUP Openers

Handheld manual pistol-grip 300mm FOUP door opener. 90° rotating handle unlocks the SEMI standard FOUP door without damaging inner door mechanism (a common problem with FOUP “keys”). The FOMH acts as a door tripod when removed from the FOUP; keeping the door cleaner when off of the FOUP. A reverse motion of the rotating handle closes the FOUP pod door.

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Division


Product Name


50 - 300mm
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3100 Patrick Henry Drive
Santa Clara, California, United States 95054
Phone: +1-408-982-9108
Fax: +1-408-982-9183
Email: info@h-square.com

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