Automatic Handling

VERSATILE

H-Square is an innovator in engineering automatic wafer handling systems. We specialize in designing and building automation systems for a variety of complex processes using the latest manufacturing technology.

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Wafer Sorters

The versatile wafer sorter uses the core of the exclusive patented components. One machine can be compatible with different sizes, thickness or materials of wafers. It takes only one hour to change size. Available FOUP, FOSB, SMIF and cassette. Its high sub-100um precision handling and aligning allow equipment makers, especially inspection OEM, to improve its tool performance.

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Wafer Movers

Economical, automatic single wafer transfer systems. Engineered for production, metrology, R&D, test-assembly packaging, and application labs to move wafers between two SEMI compliant process, shipping or metal cassettes. The Wafer Mover offers a simple, safe method design for transferring single wafers between two cassettes in a RECIPE or MANUAL mode of operation. A safe low contact wafer mapping end-effector scans each cassette and detects wafers for safe accurate wafer movements.

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Wafer Packers

Designed for manufacturability and end-of-line configurability the base platform can be configured to meet a range of market requirements beginning with the basic model that packs wafers with contact type robot to the upgraded non contact model that can achieve well over 100 WPH. Other enhancements are available that will improve the tolerance for very thin and warped wafers.

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Wafer Inspection Loaders

The Micro/Macro wafer inspection loader provides optional edge grip aligner that can prevent any contamination generated from the contact of front and back side of wafer. The end effector’s constant monitored gripping force assure any fragile wafer’s safety during picking and flipping. There is a tilt rotation station designed for special wafers, it grabs only at the exclusion zone to free rotation and 245˚ tilt.

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Wafer Presenters

H-Square wafer presenter tools are are engineered for fab operators to access wafers in a cassette for safer handling or macro-inspection applications. These tools greatly reduce wafer scratching and particle contamination on the wafers. Advanced materials are incorporated in the designs for ESD-safety control, lower abrasion and less tool maintenance. Wafer presenter tools are compatible with most industry SEMI compliant wafer cassettes.

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Wafer Escalators

Table top automatic notch finder/escalator aligns and escalates wafers 0.200» (“)steps for ID mark reading. Cost-effective design provides full-lot wafer tracking at a fraction of the cost of fully automated OCR systems.

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Bulk Wafer Transfers

H-Square’s automatic AWT and AVT bulk transfer tools safely mass transfer wafers between two SEMI compliant high, or low profile process, shipping, or metal cassettes. Safety sensors insure the cassettes are loaded correctly and wafers are transferred consistently. The AVT vertical transfer stages can be configured to accept quartz, graphite, silicon-carbide, or clamshell type tray carriers.

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Bulk Wafer Aligners

H-Square EZ Guide™ wafer aligners provide a fast, clean, accurate method of batch alignment of wafers to any angle. Engineered for both accurate wafer placement and for lot-integrity verification applications. Models are constructed with advanced ESD safe materials, open design laminar flow stages and feature a quick disconnect roller assembly for easy cleaning and maintenance. The ANFEZ and AFEZ can be preordered with an added inspection program installed for macro-edge inspection applications.

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RSP/SMIF Pod Openers

Automatic M200 (200mm cassette) and RSP200 (reticle) SMIF openers provide easy access to substrates stored inside minienvironment pods. H-Square’s automated openers unlock, open and store the pod lid with minimal operator involvement. Simple one button operation. Openers are compatible with standard M200 and RSP200 pod designs. Smooth, reliable lift automation for reliability and cleanliness. For the SMIFPO8 (M200) version please specify the desired orientation of the pod when ordering.

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FOUP Openers

Table-top automatic 300mm FOUP door opener. The AFO unlocks, removes and stores the FOUP door when accessing the wafers inside a FOUP. A rotating base mechanism below the FOUP allows for 360 degree rotation to position the open FOUP in the best ergonomic access position. Commonly installed at FOUP wash stations to disassemble and reassembly pods.

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50 - 300mm
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3100 Patrick Henry Drive
Santa Clara, California, United States 95054
Phone: +1-408-982-9108
Fax: +1-408-982-9183
Email: info@h-square.com

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