The Breeze™ provides a state-of-the-art touch-less solution for manually transferring wafers while introducing little to no stress to the substrate. H- Square’s Breeze™ wand is a non-contact wafer handling substrates. The handling tool uses compressed facility gases (typically Nitrogen -or- CDA - clean dry air), to stream airflow from a center sparger cap or sparger tube to the perimeter of the wafer. Wafers are manually lifted from a surface, platen, cassette, or shipping container without contact on the top or bottom surfaces of the wafer. In accordance with the pressure differential Bernoulli's principle, the wafer is “floated” on the wand apparatus at approximately 200μ (microns) from the surface of the Breeze plate. Corral pins limit side movement of a retained wafer. H-Square offers two standard models of Breeze handling systems - the H2B - a 90 degree perpendicular handle apparatus, and the H2BST - a horizontal offset handle configuration. Custom configurations are also available through your local H-Square representative.
H2BST-X Materials: Handle - Copolymer acetal, static dissipative Surface resistivity: E10 –E12 sq Plate: transparent ESD-safe Polycarbonate Corral pins: Copolymer acetal, static dissipative Trigger/lever: 316 Stainless steel Connection - connector for grip and seal connection to external OD tubing of 0.250" (6.4mm) +/- 0.010" Facility Requirements - Filtered air (CDA) or Nitrogen (N2) Input - 10-60 PSI 1.0-1.5 CFM A regulator should be installed at the Breeze connection point in order to optimally adjust the amount of gas (air) flow. Weight - 0.6lbs (0.28kg)
H2B-X Materials: Handle - Copolymer acetal, static dissipative Surface resistivity: E10 –E12 sq Plate: transparent ESD-safe Polycarbonate Corral pins: Copolymer acetal, static disspative Trigger/lever: 316 Stainless steel Connection - connector for grip and seal connection to external OD tubing of 0.250" (6.4mm) +/- 0.010" Facility Requirements - Filtered air (CDA) or Nitrogen (N2) Input - 10 - 60 PSI 1.0 - 2.0 CFM A regulator should be installed at the Breeze connection point in order to optimally adjust the amount of gas flow. Weight - 0.6 lbs (0.28kg)