High Temperature Metal Cassettes
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Termperature
Materials
SSC Series
MC12 Series
MCF Series
MC1HV Series
SQ22766 Series
2851 Series
MC1 Series
< 250°  C  
Aluminum with Teflon Stops
          X
X
< 350°  C  
All Aluminum
  X
X
X
X
   
< 550°  C
All Stainless Steel
X
           
SSC Series - All-Stainless Steel Process Cassettes
←CLICK HERE to download an SSC brochure
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contact you with metal cassette specifications,
lead time and pricing
For high temperature wafer bake-out applications or specialty applications, including megasonic and cleaning
processes. All welded 316SST electro-polished construction. Outside dimensions are similar to SEMI standard
plastic process carriers. Transfer and automation compatible. Light Weight:  Standard SST 200mm cassette
~2.5lbs.
Temperature: maximum recommended continuous operating temperature without causing distortion is 550º
Celsius. Corrosion Resistance: 316SST offers better resistance than 302 and 304 SST; resists many industrial
chemicals and solvents including: sodium and calcium brines, hypo chlorite solutions, phosphoric acid, sulfite
liquors, and sulfurous acids. Standard cassettes are designed for 75mm, 100mm, 125mm, 150mm and 200mm,
25-slot wafer configurations.  Non standard 10-slot, 12-slot, 13-slot, 26-slot and 28-slot cassettes, as well as
carriers for square substrates and other non-standard diameters and wafer thicknesses are available upon
request.  Please contact our Custom Products Department for more information.   
applications up to 550°  C
all-welded design for strength
MC12 Series - All-Aluminum 300mm Process Cassettes
←CLICK HERE to download an MC12 brochure
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contact you with metal cassette specifications,
lead time and pricing
applications up to 350°  C
all-welded design for strength
Lightweight ergonomic design minimizes weight and potential for operator fatigue. Made from welded hard clear
anodized aluminum to provide dimensional stability over time  and temperature changes. Temperature:
maximum recommended continuous operating  temperature without causing distortion is 350º Celsius. Features
SEMI standard kinematic  coupling positioners and info pad. Transfer compatible with all FOUP and FOSB
carriers. Weighs only 6.5lbs. Standard plastic FOUP weighs approximately 10 lbs. Cassette features wafer
retaining lock-bar for safe transportation of wafers in a horizontal wafer position.
MCF Series - All-Aluminum 200mm & 150mm Process Cassettes
←CLICK HERE to download an MCF brochure
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contact you with metal cassette specifications,
lead time and pricing
applications up to 350°  C
directly replaces a plastic cassette
A popular all metal cassette replacement for plastic cassettes. 150mm or 200mm all aluminum solid side wall
metal cassette is designed for use in place of standard process plastic cassettes where temperature or
dimensional stability of the plastic cassette is in question. SEMI standard MCF cassette features include robotic
flanges, aluminum wafer support combs and vented screws. Construction is T6061 aluminum with stainless
steel screws. Custom bi-pitch 12 and 13 slot models available...
MC1HV Series - All-Aluminum 200mm & 150mm Process Cassettes
←CLICK HERE to download an MC1HV brochure
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contact you with metal cassette specifications,
lead time and pricing
applications up to 350°  C
for high vacuum environments
SQ22766 Series - All-Aluminum Process Cassettes
←CLICK HERE to download an SQ22766 brochure
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contact you with metal cassette specifications, lead
time and pricing
applications up to 350°  C
for high temperature environments
This plated all aluminum cassette is designed for high temperature applications (up to  350º C).  Aluminum wafer
support cradles wafer from the bottom to prevent pinching of wafers caused by cassette expansion and
contraction.  The all aluminum plated notched  wafer support is available for our 2851 and our MC1 series, 75mm,
100mm, 125mm, 150mm and 200mm standard metal cassettes.
2851 Series - Aluminum Process Cassettes with PTFE Teflon Stops
←CLICK HERE to download an 2851 brochure
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contact you with metal cassette specifications,
lead time and pricing
applications up to 250°  C
2851 series cassettes are conventional 25 slot metal cassettes used in semiconductor manufacturing operations.  
They are typically used in areas where wafer positioning is important or where elevated temperatures cause
warpage to other carriers.  2851 series cassettes are direct replacements for many OEM metal carriers used with
wafer track/elevator systems, photo resist bake systems, and robotic loading systems for CVD and etch
processes.  This series has been incorporated as the original equipment carrier provided by similar OEM’s.  H-
Square metal cassettes offer the precision demanded by users at very competitive prices and with reasonable lead
times.The 2851 series is manufactured from aluminum alloy for precision and high strength.Slots feature an 8º
angle to reduce front and backside wafer contact.  Stainless steel spacer bars and fasteners are used to precisely
secure the side plates to each other.Two solid PFA rods are used to support the wafers in the slots.  Aluminum
2851 series cassettes are compatible with the CH handle.
MC1 Series - Aluminum Process Cassettes with PTFE Teflon Stops
←CLICK HERE to download an MC1 brochure
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contact you with metal cassette specifications,
lead time and pricing
applications up to 250°  C
MC1 series cassettes are based on the popular 2851 series, but it includes a solid end wall in place of the
stainless steel spacer bars on the end opposite the H-bar.  Six #6-32 TPI flat head screws secure the end wall.  All
other features (including PFA rod stops) of the 2851 series are incorporated in the MC1 series.  The solid end wall
is machined from 6061 T-6 aluminum alloy, and receives the same surface treatment as the carrier side plates.  
Two stainless steel rods fit into reliefs machined in the outside face of the plate.  The rods provide a mechanical
interface for the CHMC, CHMCL, CHMCDH8 style cassette handles.  The solid end wall significantly increases the
shock resistance and durability of the cassette, allowing it to remain tight and in alignment for a longer period of
time compared to the spacer bar style.  The end wall also acts as an effective particle shield for the top wafer in
applications where the cassette is used in an H-bar down (wafer horizontal) position..
low price and strong
OEM replacement
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H-Square Product Catalog
Automation & Wafer Handling Tools for the Electronics Industry