300mm Vacuum Wand Products
Automation & Wafer Handling Tools for the Electronics Industry
300mm Production Portable Vacuum Wand
ESD safe with SGI
.
Self-contained table-top Freedom Wand™, for handling 300mm wafers. Designed for heavy-
duty production. Features antistatic ESD-safe construction and SGI - safe grip indicator,
showing operator wafer is safe to handle. Ships with external batteries (2) and a stand-alone
charger unit. Vacuum tip T3PKAS1 is included with purchase. Class 1 cleanroom compatible.
Customers using the FWA3AS2 in 220V power locations should add either 602299 (E) or
602300 (UK) outlet plug cords when ordering
Part Number
Description
Material
FWA3AS2
COMPLETE SET
ANTISTATIC PEEK /PP
602299
POWER CORD E
EUROPEAN PLUG
602300
POWER CORD UK
UNITED KINGDOM PLUG
     
300mm Production Portable Vacuum Wand
ESD safe with SGI
A Class 1 cleanroom approved self-contained cordless battery powered vacuum wands
allows freedom from vacuum lines.  This standard  handling kit ships complete with FWCR
wand, 2-meter charging cord, charging stand, T3PKAS1 ESD safe PEEK vacuum tip for
handling 300mm SEMI standard wafers. Additional vacuum tips can be purchased separately
to handle various substrate sizes – please contact H-Square for application specific
recommendations. Customers using the FWCR3 in 220V power locations should add either
602299 (E) or 602300 (UK) outlet plug cords when ordering
Part Number
Description
Material
FWCR3
COMPLETE SET
ANTISTATIC PEEK /PP
602299
POWER CORD E
EUROPEAN PLUG
602300
POWER CORD UK
UNITED KINGDOM PLUG
     
300mm Vacuum Wand Set - General
Handling -
Table/Wall Mount, Antistatic
An industry standard normally open flow table-mount or wall-mount vacuum wand tool setup
for handling SEMI standard 300mm wafers in a cleanroom environment.  Performance plastic
antistatic construction - ESD safe PEEK vacuum tip, ESD safe PVDF wand handle, ESD safe
heavy-duty coil cord - vacuum supply hose, ESD safe grounding adapter and table side
mount / wall mount white polypropylene mountable shutoff holder.
Part Number
Description
Material
T3PKAS1
VACUUM TIP
ANTISTATIC PEEK
NO3AS1
VACUUM WAND
ANTISTATIC PVDF
HSU3
SHUTOFF HOLDER
WHITE POLYPROPYLENE
CC11ESD1
COIL CORD with GROUNDING
ANTSTATIC
POLYURETHANE
 
300mm Vacuum Wand Set - General
Handling -
Tabletop Movable, Antistatic
An industry standard normally open flow tabletop movable vacuum wand tool setup for
handling SEMI standard 300mm wafers in a cleanroom environment.  Performance plastic
antistatic construction - ESD safe PEEK vacuum tip, ESD safe PVDF wand handle, ESD safe
heavy-duty coil cord - vacuum supply hose, ESD safe grounding adapter and tabletop white
polypropylene shutoff holder.
Part Number
Description
Material
T3PKAS1
VACUUM TIP
ANTISTATIC PEEK
NO3AS1
VACUUM WAND
ANTISTATIC PVDF
HSU3PT
SHUTOFF HOLDER
WHITE POLYPROPYLENE
CC11ESD1
COIL CORD with GROUNDING
ANTSTATIC
POLYURETHANE
 
300mm Vacuum Wand Set - High
Temperature RTP
An special application normally open table-top vacuum wand tool setup for handling 300mm
wafers in a high temperature cleanroom environment.  Quartz vacuum tip, Stainless steel
hardened tubing, PEEK wand handle, ESD safe heavy-duty coil cord - vacuum supply hose,
ESD safe grounding adapter and white polypropylene tabletop shutoff holder..
Part Number
Description
Material
NOP191-003
VACUUM WAND AND TIP
QUARTZ TIP
HSUPT
SHUTOFF HOLDER
WHITE POLYPROPYLENE
CC11ESD1
COIL CORD with GROUNDING
ANTISTATIC
POLYURETHANE
     
 
300mm/200mm Vacuum Wand Set - Thin
Wafer Packout Handling
An special application normally open table-top vacuum wand tool setup for handling thin
300mm wafers to/from a recessed cavity stack shipping package. Heat-treated T6061
aluminum vacuum tip with PFA
seal coating, Anodized aluminum adapter, PVDF wand
handle, ESD safe heavy-duty coil cord - vacuum supply hose, ESD safe grounding adapter
and white polypropylene tabletop shutoff holder..
Part Number
Description
Material
MISC1400-004
COMPLETE SETUP
PFA COATED ALUMINUM
     
     
     
 
Vacuum Wand Performance Test Gauge
Wafer Size: 50mm-300mm
A stand alone weighted base table-top vacuum testing gauge tool for checking vacuum
strength (Hg”) to determine vacuum wand tip and overall setup performance.  Operator
places the vacuum tip on the right side of the tower to quickly check the health of the
vacuum wand tool. VTG2 features secondary tubing adapter for directly checking the input
vacuum hose if needed.
Part Number
Description
Material
VTG2
Vacuum Test Gauge
Black Acetal
     
     
     
 
300mm Vacuum Wand Set - Thin Wafer
UHMW Touchpad,
Antistatic
A special application UHMW Polyethylene touch pad vacuum tip for handling thin wafers or
for handling version
normally open flow tabletop table/wall mount vacuum wand tool setup for
handling SEMI standard 300mm wafers in a cleanroom environment.  Performance plastic
antistatic construction - ESD safe PEEK vacuum tip, ESD safe PVDF wand handle, ESD safe
heavy-duty coil cord - vacuum supply hose, ESD safe grounding adapter and tabletop white
polypropylene shutoff holder.
Part Number
Description
Material
T3PKUTF
VACUUM TIP
ANTISTATIC PEEK
NO3AS1
VACUUM WAND
ANTISTATIC PVDF
HSU3PT
SHUTOFF HOLDER
WHITE POLYPROPYLENE
CC11ESD1
COIL CORD with GROUNDING
ANTSTATIC
POLYURETHANE
 
300mm Vacuum Wand Set - Offset Angle
Tabletop Movable, Antistatic
An special application 45 degree angled 3" offset, normally open flow tabletop movable
vacuum wand tool setup for handling SEMI standard 300mm wafers in a
recessed cavity
application
.  Performance plastic antistatic construction - ESD safe PEEK vacuum tip, ESD
safe PVDF wand handle, ESD safe heavy-duty coil cord - vacuum supply hose, ESD safe
grounding adapter and tabletop white polypropylene shutoff holder.
Part Number
Description
Material
T3PKAS45
VACUUM TIP
ANTISTATIC PEEK
NO3AS1
VACUUM WAND
ANTISTATIC PVDF
HSU3PT
SHUTOFF HOLDER
WHITE POLYPROPYLENE
CC11ESD1
COIL CORD with GROUNDING
ANTSTATIC
POLYURETHANE
 
300mm Vacuum Wand Set - UHMW
Touchpad, Tabletop Movable, Antistatic
A special normally open flow tabletop movable vacuum wand tool setup for handling SEMI
standard 300mm wafers in a cleanroom environment.  Performance plastic antistatic
construction - ESD safe PEEK vacuum tip, ESD safe PVDF wand handle, ESD safe
heavy-duty coil cord - vacuum supply hose, ESD safe grounding adapter and tabletop white
polypropylene shutoff holder.
Part Number
Description
Material
T3PKUTF45
VACUUM TIP
ANTISTATIC PEEK
NO3AS1
VACUUM WAND
ANTISTATIC PVDF
HSU3PT
SHUTOFF HOLDER
WHITE POLYPROPYLENE
CC11ESD1
COIL CORD with GROUNDING
ANTSTATIC
POLYURETHANE