200mm Vacuum Wand Products
Vacuum Tips - cassette-to-platen/susceptors toolsets 200mm wafer handling
T75082 (QUARTZ)
A quartz tip for handling 5” to 8” wafers in higher
temperature applications. Large support area minimizes
vacuum distortion. Invar/Stainless steel tube.
Recommended for use with Quick-Lock wands.
Uses NOASQ2 (QUICK LOCK CONNECTION) wand handle (normally open), shut off holder, coil vacuum cord and
a grounding adapter.
PART NUMBER
DESCRIPTION
MATERIAL
NOASQ2
WAND HANDLE
ESD Safe PVDF
see below
VACUUM TIP
see below
CC11SDS
COIL CORD
ESD Safe Polyurethane
CTA12
GROUND ADP
Stainless Steel
HSU
HOLDER
White Polypropylene
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T75050PKAS
A very rigid ESD Safe PEEK tip for general handling of up
to 8” wafers. Large support area minimizes vacuum
induced distortion. Shallow pocket allows fast, positive pick
up. Can be used in some applications to separate wafers
from adjacent surface. Secondary angle allows positive
handling in the event of front edge damage. Consider Full
Hard tube for larger wafers.
T75050V
A very rigid high temperature Vespel tip for general
handling of up to 8” wafers. Large support area minimizes
vacuum induced distortion. Shallow pocket allows fast,
positive pick up. Can be used in some applications to
separate wafers from adjacent surface. Secondary angle
allows positive handling in the event of front edge damage.
Consider Full Hard tube for larger wafers.
T75051PKAS
A rigid, knife-edged ESD safe PEEK tip for
loading/unloading of wafers up to 8” from platens and
susceptors. Large support area minimizes vacuum induced
distortion. Shallow pocket allows fast positive pick up.
Consider Full Hard tube for larger wafers.
T75051V
A rigid, knife-edged high temperature Vespel tip for
loading/unloading of wafers up to 8” from platens and
susceptors. Large support area minimizes vacuum induced
distortion. Shallow pocket allows fast positive pick up.
Consider Full Hard tube for larger wafers.
Automation & Wafer Handling Tools for the Electronics Industry
200mm Production Portable Vacuum Wand
ESD safe with SGI
Self-contained table-top Freedom Wand™, for handling 200mm wafers. Designed for heavy-
duty production. Features antistatic ESD-safe construction and SGI - safe grip indicator light
showing operator wafer is safe to handle. Ships with external batteries (2) and a stand-alone
charger unit. Vacuum tips are sold separately.Class 1 cleanroom compatible.
Recommended vacuum tip is T693PKAS3. Customers using the FWAHAS2 in 220V locations
should add either 602299 (E) or 602300 (UK) power outlet plug cords when ordering
Part Number
Description
Material
FWAHAS2
COMPLETE SET
ANTISTATIC
POLYPROPYLENE
602299
POWER CORD E
EUROPEAN PLUG
602300
POWER CORD UK
UNITED KINGDOW PLUG
T693PKAS3
VACUUM TIP
ANTISTATIC PEEK
200mm Cordless Portable Vacuum Wand
A Class 1 cleanroom approved self-contained cordless battery powered vacuum wands
allows freedom from vacuum lines.  This standard  handling kit ships complete with FWCR
wand, 2-meter charging cord, charging stand, T693PKAS3 ESD safe PEEK vacuum tip for
handling 125mm-200mm SEMI standard wafers. Additional vacuum tips can be purchased
separately to handle various substrate sizes – please contact H-Square for application
specific recommendations.
Part Number
Description
Material
FWCR2
COMPLETE SET
TIP ANTISTATIC PEEK
602299
POWER CORD E
EUROPEAN PLUG
602300
POWER CORD UK
UNITED KINGDOW PLUG
     
200mm Vacuum Wand Set - General
Handling -
Table/Wall Mount, Antistatic
An industry standard normally open flow table-mount or wall-mount vacuum wand tool setup
for handling SEMI standard 200mm SILICON wafers in a cleanroom environment.  
Performance plastic antistatic construction - ESD safe PEEK vacuum tip, ESD safe PVDF
wand handle, ESD safe heavy-duty coil cord vacuum supply hose with grounding adapter
and table side mount / wall mount white polypropylene mountable shutoff holder.
Part Number
Description
Material
T693PKAS3
VACUUM TIP
ANTISTATIC PEEK
NOASPF2
VACUUM WAND
ANTISTATIC PVDF
HSU
SHUTOFF HOLDER
WHITE POLYPROPYLENE
CC11ESD1
COIL CORD with GROUNDING
ANTSTATIC
POLYURETHANE
 
200mm Vacuum Wand Set - General
Handling -
Tabletop Movable, Antistatic
An industry standard normally open flow moveable tabletop vacuum wand tool setup for
handling SEMI standard 200mm wafers in a cleanroom environment.  Performance plastic
antistatic construction - ESD safe PEEK vacuum tip, ESD safe PVDF wand handle, ESD safe
heavy-duty coil cord - vacuum supply hose, ESD safe grounding adapter and tabletop white
polypropylene shutoff holder.
Part Number
Description
Material
T693PKAS3
VACUUM TIP
ANTISTATIC PEEK
NOASPF2
VACUUM WAND
ANTISTATIC PVDF
HSUPT
SHUTOFF HOLDER
WHITE POLYPROPYLENE
CC11ESD1
COIL CORD with GROUNDING
ANTSTATIC
POLYURETHANE