150mm Vacuum Wands
Copyright © 2017 - H-Square Corporation  Santa Clara, California, USA All Rights Reserved
PART NUMBER
DESCRIPTION
MATERIAL
NOASPF2
WAND HANDLE
ESD Safe PVDF
T693PKAS3
VACUUM TIP
ESD Safe PEEK
CC11SDS
COIL CORD
ESD Safe Polyurethane
CTA12
GROUND ADP
Stainless Steel
HSU
HOLDER
White Polypropylene
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150mm Vacuum Wand Set - ESD safe, cassette to cassette handling
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wand handling brochure
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contact you with vacuum wand specifications,
lead time and pricing
Vacuum Tips - cassette-to-cassette 150mm wafer handling
T693PKAS3
Thin, one-piece molded Press-Fit tips for general handling of up
to 8” wafers. Molded from rigid carbon filled PEEK for strength
and ESD protection. May be used directly with Universal PEEK
and Anti-Static, Press-Fit wands or with the appropriate adapter
on all Quick-Lock Wands. 3 bend allows vacuum area of tip to
hold closer to the center of large wafers for better leverage and
increased holding strength.
T794PKAS
Thin, one-piece molded Press-Fit tips for general handling.
Thin substrates (0.005” - .015”) 100mm-150mm. Molded from
rigid carbon filled PEEK for strength and ESD protection.
Vacuum Tips - cassette-to-platen/susceptors toolsets 150mm wafer handling
T75033QV
Designed for high temperature applications. Wafer holding
area is made of quartz, which is continuously usable to
1425C. Vespel pick up withstands 480C on a short-
term basis. Vespel surrounds quartz to protect it from
damage. Knife-edged spatula facilities pick up of wafers
from flat surfaces. Ideal for removing wafers from epitaxial
reactors and other high temperature processes.
T75071V
A high temperature Vespel narrow, knife-edged tip for
loading/unloading wafers up to 6” from stages offering
limited access. Vacuum pocket side has minimal angle to
allow wand to remain relatively parallel to wafer and stage.
Uses NOASPF2 (PRESS FIT CONNECTION) Wand handle (normally open), Shut off holder, Coil Vacuum Cord
and a grounding adapter.
Uses NOASQ2 (QUICK LOCK CONNECTION) wand handle (normally open), shut off holder, coil vacuum cord and
a grounding adapter.
PART NUMBER
DESCRIPTION
MATERIAL
NOASQ2
WAND HANDLE
ESD Safe PVDF
see below
VACUUM TIP
see below
CC11SDS
COIL CORD
ESD Safe Polyurethane
CTA12
GROUND ADP
Stainless Steel
HSU
HOLDER
White Polypropylene
←CLICK HERE to have a sales representative
contact you with vacuum wand specifications,
lead time and pricing
T693PKAS2D (BENT DOWN 20 degrees)
Thin, one-piece molded Press-Fit tips for general handling of
up to 8” wafers. Molded from rigid conductive carbon filled
PEEK for strength and ESD protection. May be used directly
with Universal PEEK and Anti-Static, Press-Fit wands or with the
appropriate adapter on all Quick-Lock Wands.
T693PKAS2U (BENT UP 20 degrees)
Thin, one-piece molded Press-Fit tips for general handling of up
to 8” wafers. Molded from rigid conductive carbon filled PEEK for
strength and ESD protection. May be used directly with Universal
PEEK and Anti-Static, Press-Fit wands or with the appropriate
adapter on all Quick-Lock Wands.
T694PKAS
Thin, one-piece molded Press-Fit tips for general handling of up
to 6” wafers. Molded from rigid carbon filled PEEK for strength
and ESD protection. May be used directly with Universal PEEK
and Anti-Static, Press-Fit wands or with the appropriate adapter
on all Quick-Lock wands. 3 bend allows vacuum area of tip to
hold closer to the center of large wafers for better leverage and
increased holding strength.
T693PKAS3-001
Thin, one-piece molded Press-Fit tips for general handling.
Thin substrates (0.005” - .015”) and Compound Semi wafers
with large diameters, e.g., 6”-8”. Molded from rigid carbon filled
PEEK for strength and ESD protection.
T696PK—UHMW Contact Pad PEEK Tip
Thin, one‐piece molded Press‐Fit tips for general wafer
handling of 100mm‐200mm wafers. Same as T693PKAS3 but
with added UHMW Polyethylene vacuum pocket. Thin laser cut
UHMW pad is bonded to PEEK with cleanroom approved
adhesive. UMHM surface reduces scratching and contamination
as process contamination does not adhere to the surface.
Excellent for double sided polished wafer handling applications.
Molded from rigid carbon filled PEEK for strength and ESD
protection.
T693PKAS3-007 Insertion Prevention PEEK tips
Molded Press‐Fit tips for general handling. Same as
T693PKAS3 but includes bump on the backside of the tip to
prevent operators from inserting tips between wafers in a
standard pitch cassette. Molded from rigid carbon filled PEEK
for strength and ESD protection. Recommended vacuum wand
handle is NOASPF2.
T75055V
A high temperature Vespel knife-edged tip for
loading/unloading of wafers up to 6” from platens and
susceptors.
Automation & Wafer Handling Tools for the Electronics Industry