OEM Components


There is a lot to consider when designing a robotic wafer handling system. H-Square Automation brings experience providing state-of-the-art OEM component parts for even the most demanding substrate handling applications. Let our team show you how to succeed in your project.

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RSP/SMIF Pod Openers

Automatic M200 (200mm cassette) and RSP200 (reticle) SMIF openers provide easy access to substrates stored inside minienvironment pods. H-Square’s automated openers unlock, open and store the pod lid with minimal operator involvement. Simple one button operation. Openers are compatible with standard M200 and RSP200 pod designs. Smooth, reliable lift automation for reliability and cleanliness. For the SMIFPO8 (M200) version please specify the desired orientation of the pod when ordering.

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Aluminum Wafers

Used as durable, shatterproof replacements for semiconductor wafers in training, robotic calibration, particle shield, identification, and equipment demonstrations. Mock wafers are precision manufactured from 6061 T-6 aluminum alloy. Each wafer is chemically etched and heat-treated to improve flatness and surface hardness and durability. Mock wafers are available bare aluminum or hard clear (HC) anodized.

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50 - 300mm
3100 Patrick Henry Drive
Santa Clara, California, United States 95054
Phone: +1-408-982-9108
Fax: +1-408-982-9183
Email: info@h-square.com

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