As the industry moves from one technology generation to the next in its drive to make smaller, faster and more functional chips, H-Square is always
there – providing the leading-edge technology to help make it happen. We are the world’s #1 provider of cassette to cassette wafer transfer
equipment, offering both automatic and manual solutions to state-of-the-art manufacturing customers. Automatic Low Contact Transfers (LCT) and
manual horizontal transfer (WT) are routinely modified for thin wafer transfer applications.  Contact your local H-Square representative for more
details.
Copyright © 2015 - H-Square Corporation  Santa Clara, California, USA All Rights Reserved
AWM - 75mm / 100mm/ 125mm/ 150mm/ 200mm
Automatic Wafer Mover. Safe Economical Single
Wafer Transfer System.
WS300M - 300mm Automatic Wafer Mover. Safe
Economical Single Wafer Transfer System.
Wafer Transfers
Automatic Low Contact FOUP/FOSB Transfer  - 300mm
Automatic Low Contact Transfer  - 100mm, 150mm, 200mm
300mm low contact transfer machine provides safe means of mass transferring wafers from
cassette to cassette. Wafers are gently lifted midpoint in the cassette slots before extracting
or the cassette which could cause parti
culation. Safety sensor detects wafers in the pod. A
wafer mapper detects cross slotted wafers. User-friendly fail-safe operation features simple
one-button actuation. Small footprint saves valuable cleanroom space. Sturdy construction
assures high reliability and robustness required in high throughput fabs. Unit is compatible
with SEMI standard FOUPs and FOSBs and SEMI standard metal cassettes like MC12-
25HC1. Class 1 cleanroom compatible. ESD safe construction.
Low contact transfer machine provides a safe means of mass transferring wafers from
cassette to cassette. Wafers are gently lifted midpoint in the cassette slots before extracting or
loading them to minimize contact with the cassette which could cause particulation or wafer
edge chipping. Optical and mechanical sensors combined with software logic guard against
operation errors such as trying to transfer wafers into a cassette which is already loaded with
wafers. User-friendly fail-safe operation features simple one-button actuation. Sturdy
construction assures high reliability and robustness required in high throughput fabs. Small
footprint saves valuable cleanroom space.
additional substrate sizes are available
ultra thin wafer versions available
( < 220 microns)
LCT1AS4 - 100mm system
LCT1AS6 - 150mm system
LCT1AS8 - 200mm system
LCT1AS12 - 300mm system
LCT1AS12AC-003- 300mm
Automatic Vertical Transfer  - 100mm, 150mm, 200mm
Vertical transfer machine safely mass transfers wafers between
various combinations of plastic, metal and quartz cassettes.
Small footprint saves valuable cleanroom space
. Proprietary
wafer lifter minimizes alignment problems. Cassettes move,
rather than wafers, for safer, cleaner transfer. Absence of comb
pivot points above wafers ensures cleanliness. Single button
operation makes unit very user-friendly. Simple design for
reliability and low maintenance. Class 1 cleanroom compatible

AVT4 - 100mm system
AVT6 - 150mm system
AVT8 - 200mm syste
Automatic wafer transfer machines safely mass transfers wafers between cassettes Small footprint design
minimizes valuable work bench space required for operation
. Color-coded positioning dots make correct
cassette placement easy for operators
. Heavy-duty construction and high-quality internal components assure
long life and continued accuracy. Cassette position sensors allow operation only when cassettes are properly
positioned to assure safe wafer transfers. Added safety provided by circuitry which stops transfer when
excessive force is detected. ESD safe construction. Class 1 cleanroom compatible
AWT2HL4 -      100mm system
AWT2HL6 -     150mm system
AWT4HL8 -     200mm system
Manual wafer transfer machines safely mass transfers wafers between various combinations of SEMI
standard cassettes. Units are constructed of chemical resistant materials and are ideal for wet areas. ESD
safe construction - Class 10 cleanroom com
patible
Automatic Horizontal Slide Transfer  - 100mm, 150mm, 200mm
Manual Horizontal Slide Transfer  - 100mm, 150mm, 200mm
WT3456AS
Multi Wafer Size Transfer 75mm, 100mm, 125mm, 150mm
WT3HAS
75mm High Wall
WT4HAS
100mm High Wall
WT5HAS
125mm High Wall
WT6HAS
150mm High Wall
WT6HLAS
150mm High Wall / Low Wall
WT28HAS
200mm High Wall
WT28HLAS
200mm High Wall / Low Wall
ODD EVEN HORIZONTAL TRANSFER
A custom version of H-Square's standard WT horizontal slide
transfer with special 13 rod transfer arm that allows the
operator to switch a safety interlocked cam mechanism
aligning the transfer arm to the ODD or EVEN wafers in a 25
wafer cassette.
WAFER FLIPPING HORIZONTAL TRANSFER
A custom version of H-Square's standard WT horizontal slide
transfer with special stage modifications to allow for the
cassettes to be inverted (h-bar UP) when applications dictate
a change in orientation of the wafers.
Wafer Mover Single Wafer Transfers  - 75mm, 100mm, 150mm, 200mm,
300mm
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Handling Tools for the Electronics Industry