SMIF POD / FOUP Openers
Copyright © 2017 - H-Square Corporation  Santa Clara, California, USA All Rights Reserved
FOUP Openers
   
AFO - AUTOMATIC FOUP POD OPENER
Automatic door opener provides clean and easy
access to wafers in a SEMI standard 300mm
FOUP. Interlocked load port turntable stage
allows for 360 degree FOUP rotation to give
operators access to the open FOUP.
When open, the FOUP door is kept clean. Simple
design for reliability and low maintenance. Unique
low profile design ideal for tabletop applications
and FOUP wash stations. Small footprint saves
valuable cleanroom space.

AFO
FOMH - MANUAL 300mm FOUP POD OPENER
Manual ergonomic dual-pistol grip design allows
for FOUP doors to be propped up when door is
removed. One pistol grip handle rotates, turning
the FOUP door opening mechanism. Simple
designs for reliability and low maintenance.


FOMH
RSP150 Openers
   
SMIFPO2-6 -AUTOMATIC RSP150 RETICLE
SMIF POD OPENER
Semiautomatic RSP150/MSP150 reticle pod
opener. Opens and closes both single and
multiple stack mask handling pods. Features
mask protrusion sensor to ensure correct mask
location prior to closing the lid..

SMIFPO2-6

SMIFMAN6 - RSP150 MANUAL RETICLE SMIF
POD OPENER
An economical means to gain access to the
interior of a RSP150 reticle photomask storage
POD. Works with single and multistack style
RSP150 PODs.
Features POD lid storage area to keep the lid
base clean when set aside from the base
mechanism. ESD Safe design. Small tabletop
footprint.

SMIFMAN6
RSP200 Openers
   
SMIFPO8 AUTOMATIC RSP200 RETICLE SMIF
POD OPENER
Semi-automatic RSP200 reticle SMIF pod opener
provides easy access to photomasks stored
inside RSP200 cassettes with minimal operator
involvement.Units are compatible with most
standard RSP200 pod designs. Smooth, reliable
lift automation for reliability and cleanliness. Class
One Cleanroom compatible. ESD protection
insured by static dissipative plastics.

SMIFPO8-RSP
SMIFMAN8 - RSP200 MANUAL RETICLE SMIF
POD OPENER
An economical means to gain access to the
interior of an RSP200 reticle photomask storage
pod. Features pod lid storage platform to keep
the RSP lid clean when accessing the pod. ESD
safe design. Small tabletop footprint. May also be
used to open/close 200mm SMIF POD cassettes.

SMIFMAN8
M2000 Openers
   
SMIFPO8 - AUTOMATIC 200mm M2000 SMIF
POD OPENER
Semi-automatic SMIF pod opener provides easy
access to wafer cassettes with minimal operator
involvement. Units are compatible with most
standard 200mm SMIF pod designs. Smooth,
reliable lift automation for reliability and
cleanliness. Class One Cleanroom compatible.
ESD protection insured by static dissipative
plastics. Designs available for two different wafer
cassette orientations.

SMIFPO8
SMIFMAN8 - 200mm MANUAL SMIF POD
OPENER

An economical means to gain access to the
interior of a 200mm SMIF pod process cassette.
Units are compatible with most standard 200mm
SMIF pod designs. Features pod lid storage
platform to keep the lid base clean when
accessing the pod. ESD safe design. Small
tabletop footprint. May also be used to
open/close RSP200 reticle SMIF pods.

SMIFMAN8
Automation & Wafer Handling Tools for the Electronics Industry