FOUP, RSP150, RSP200, M2000 Pod Openers
Automation & Wafer Handling Tools for the Electronics Industry
AFO
300mm AutomatiicFOUP Door Opener
 
300mm FOUP door opener and door storage platform.
This tabletop automation allows an operator to gain
access to a FOUP to manually unload and load wafers
from the POD cassette. The AFO features a rotating
base to best position the FOUP for safer wafer
handling.  This system is also commonly used to
disassemble the pod cassette at wash stations.
FOMH
300mm and 450mm Manual FOUP Door Opener
 
A manual hand-held FOUP door opener.  The
ergonomic dual pistol grip FOMH is easy to use and
will not damage the plastic mechanisms of the FOUP
door like "keys" do.  When in use, the handle design
also acts as a tripod to keep the interior of the door
clean.300mm and 450mm FOUP door openers are
available.
SMIFPO16
RSP150 Automatic Reticle Pod Opener
 
A tabletop semi-automatic RSP150 reticle pod
operner.  This simple to use cleanroom automation
tool allows operators to access masks and RSP
cassette inside the RSP150 mini-environment.
Compatible with single and multistack RSP150 pods.
Class1 cleanroom compatible.
SMIFMAN6
RSP150 Manual Reticle Pod Opener
 
An economical means to gain access to the interior
of a RSP150 reticle photomask storage POD. Works
with single and multistack style RSP150 PODs.
Features POD lid storage area to keep the lid base
clean when set aside from the base mechanism. ESD
Safe design. Small tabletop footprint.
SMIFPO8-E-002
RSP200 Automatic Reticle Pod Opener
 
A tabletop semi-automatic RSP200 reticle SMIF pod
operner.  This simple to use cleanroom automation
tool allows operators to access photomasks inside the
RSP200 pod mini-environment.  Class1 cleanroom
compatible.
SMIFMAN8
RSP200 Manual Reticle Pod Opener
 
The SMIFMAN8 is a tabletop manual RSP200
SMIFpod opener.  This economical, antistatic
construction tool features a swing-arm opening
mechanism; opening and closing the M2000 or
RSP200 center turn mechanism.  A low contact
secondary stage area keeps the lid clean when the
SMIF pod is open..  
SMIFPO8
M2000 Automatic SMIF Pod Opener
 
A tabletop semi-automatic M2000 SMIF Pod cassette
operner.  This simple to use cleanroom automation
tool allows operators to access wafers and cassette
inside the SMIF pod mini-environment.  Class1
cleanroom compatible.
SMIFMAN8
M2000 Manual SMIF Pod Opener
 
The SMIFMAN8 is a tabletop manual M2000 SMIFpod
opener.  This economical, antistatic construction tool
features a swing-arm opening mechanism; opening
and closing the M2000 or RSP200 center turn
mechanism.  A low contact secondary stage area
keeps the lid clean when the SMIF pod is open..