H-Square’s complete line of photomask handling tools is the result of years of work with semiconductor companies and mask shops to provide a non-
contaminating secure means of handling reticles.  Mask Picks can reduce contamination by eliminating direct contact of the mask by an operator’s
hands. Masks are easily inserted and extracted from various fixtures and storage containers, and are securely gripped while loaded in the pick. With
the stringent cleanliness requirements for sub-micron applications today, mask picks have become indispensable. In addition to mask picks, H-
Square has designs for many support tools for opening and closing reticle pods to PM mask inspection and cleaning.
Copyright © 2015- H-Square Corporation  Santa Clara, California, USA All Rights Reserved
SQ21408 SERIES PHOTO-MASK
INSPECTION & CLEANING
STATION
Mask inspection stand facilitates
hands off visual inspection and
Nitrogen or CDA blow off
applications. Two 360° degree
theta motions allow for easy
positioning of masks under bright
light. Smooth operation makes it
easy to scan for and pinpoint
particles. Compact tabletop design
saves expensive cleanroom
space. Cost efficient alternative to
automatic/semiautomatic
inspection tools. Made from ESD
safe cleanroom materials to insure
cleanliness.

SQ21408-1 for 6" x 6" x 0.250" masks
pictured
PC SERIES PTFE TEFLON®
PHOTOMASK CLEANING
CASSETTES
All PTFE cassettes hold photo
masks in a vertical position for
easy cleaning in  various
processing baths. Photomask
cleaning cassettes are available in
a variety of sizes and either
incorporate a handle or wet bench
can be incorporated to lift the
mask up to interface.
MISC2500
TABLETOP MACRO BRIGHT
LIGHT INSPECTION BOX
Table top bright light reflection
containment chamber with a 250
watt halogen full spectrum light
source.  The system includes an
integrated automatic on/off motion
sensor switch and an over sized
lamp cool without the need of a
fan. Substrates are manually
placed into the black anodized light
absorbing chamber and viewed
under the concentrated light
source.

MISC2500-007 Brightlight Box
MPS1 -
PHOTOMASK PICKS - SIDE GRIP
MPS1 series mask picks handle
the mask reticle from the SIDE
tangential edges of the mask to
reduce contamination by
eliminating direct contact of mask
with gloved hands. MPS1 versions
are directly compatible with most
mask handling operations.  
Custom versions are available.

MPS1-50             5" x 5" x 0.090" masks
MPS1-63             6" x 6" x 0.250" masks

ANTISTATIC VERSIONS:
MPS1-50-014    ESD safe  5" x 5" x
0.090"
SQ21457-25      ESD safe  6" x 6" x
0.250"

Please contact H-Square for
additional ordering options and
part numbers
MPH1
PHOTOMASK PICKS -
HORIZONTAL
MPH1 series mask picks handle
the mask reticle from the top and
bottom orientation tangential edge
to reduce contamination by
eliminating direct contact of mask
with gloved hands. MPH1 versions
are commonly used to load masks
into metrology and mask cleaning
support systems where side
clearances on the MPS1 do not fit.

MPH151DW          5" x 5" x 0.090"
masks
MPH163VO          6" x 6" x 0.250"
masks

ANTISTATIC VERSIONS:
MPH151DW-005    5" x 5" x 0.090"
masks
SQ21457-6            6" x 6" x 0.250"
masks

Please contact H-Square for
additional ordering options and
part numbers
MPH1
PHOTOMASK PICKS -
HORIZONTAL 90° GRIP
MPH1 90 series mask picks handle
the mask reticle from the top and
bottom orientation tangential edge
eliminating direct contact of mask
with gloved hands. The handle is
90 degrees perpedicular
orientation for placing a mask
down into a cavity, like a cleaning
station.

MPH90151DW           5" x 5" x 0.090"
masks
MPH90163VO           6" x 6" x 0.250"
masks

ANTISTATIC VERSIONS:
MPH90151DW-005   5" x 5" x 0.090"
masks
SQ21457                     6" x 6" x 0.250"
masks

Please contact H-Square for
additional MPH90° part numbers
and options
SQ21518
NIKON STEPPER MASK PICKS
Mask picks reduce
contamination by eliminating
direct contact of mask with
hands. The four gripper
horizontal offset SQ21518
mask pick is designed to load
and unload masks from a
NIKON Stepper mask cartridge.
Picks are lightweight,
economical and easy to use.
Many designs feature a locking
latch trigger to safe guard the
premature release of a
valuable photomask. All
designs are ESD safe
(antistatic).

SQ21518-40       5"x5"x0.090"
masks
SQ21518-16       6" x 6" x 0.250"
masks

Please contact H-Square for
additional options and ordering
part numbers.

For this mask pick knowledge
of the location of any pellicle
frame is required.
SMIFMAN6 -
MANUAL RSP150 RETICLE SMIF
POD OPENER
Provides clean, easy access to
photomasks in any MSP or RSP
reticle storage pod cassette. The
SMIFMAN6 allows the operator to
manually open the pod to gain
access to the inner mask cassette
or tray. Features a clean storage
area for the pod lid to be stored
during operator interface and
mask pick holder. All materials are
ESD safe.

SMIFMAN6    RSP150 / MSP150 Opener
SMIFPO6 -
AUTOMATIC RSP150 RETICLE
SMIF POD OPENER
Semi-automatic RSP200 reticle
SMIF pod opener provides easy
access to photomasks stored
inside RSP200 cassettes with
minimal operator involvement.
Units are compatible with most
standard RSP200 pod designs.
Smooth, reliable lift automation for
reliability and cleanliness. Class
One Cleanroom compatible. ESD
protection insured by static
dissipative plastics.

SMIFPO6           RSP150 / MSP150
Opener
SMIFMAN8 -
MANUAL RSP200 RETICLE SMIF
POD OPENER
Provides clean, easy access to
photomasks in any MSP or RSP
reticle storage pod cassette. The
SMIFMAN8 allows the operator to
manually open the pod to gain
access to the inner mask cassette
or tray. Features a clean storage
area for the pod lid to be stored
during operator interface and
mask pick holder. All materials are
ESD safe.

SMIFMAN8   RSP200 / M2000 Opener
SMIFPO8 -
AUTOMATIC RSP200 RETICLE
SMIF POD OPENER
Semi-automatic RSP200 reticle
SMIF pod opener provides
easy access to photomasks
stored inside RSP200
cassettes with minimal operator
involvement.
Units are compatible with most
standard RSP200 pod designs.
Smooth, reliable lift automation
for reliability and cleanliness.
Class One Cleanroom
compatible. ESD protection
insured by static dissipative
plastics.

SMIFPO8       RSP200 Opener
MPV -
MASK PICKS - VERTICAL
Mask picks reduce contamination
by eliminating direct contact of
mask with hands. The MPV series
mask pick provides a means to lift
a mask from a vertical position like
a photomask cassette. Picks are
lightweight, economical and easy
to use ESD safe versions
available. Custom designs with
special angles, customized
grippers, locking triggers, custom
materials or other non-standard
features are also
available.

MPV1-4         4" x 4" masks
MPV1-5        5" x 5" masks
MPV1-6          6" x 6" masks

ANTISTATIC VERSIONS:
SQ21457-4   6" x 6" masks

Please contact H-Square for
additional MPV part numbers.
MPH -
Mask picks reduce contamination
by eliminating direct contact of
mask with hands. The MPH/MPC
series mask picks provide a
means for loading masks into a
cleaner
tool or recessed cavity. Grippers
are offset anywhere from 1.7" to
11" from the handle. Picks are to
use ESD safe versions available.
Custom designs with special
locking triggers, custom materials
or other non-standard features
are also available.

Please contact H-Square for
numbers.
MISC2500 and SQ20999
MASK CASSETTE LIFTER
BLOCKS
Lifter blocks are designed to
provide easy access to masks.
Masks are lifted out of cassettes,
providing access to mask edges
for removal with appropriate style
mask pick. Mask lifter blocks are
available in a variety of sizes and
materials, many of
which are ESD safe

SQ20999-2 for 6" x 6" x 0.250" in
an ASML RSP cassette pictured
GP  
PHOTOMASK RESCUE
VACUUM WAND ASSEMBLY
Six vacuum cup mask rescue
tool for removing automation
stranded masks from
production tools. 90° degree
angle and horizontal offset
versions available. Made from
ESD safe cleanroom materials
to insure cleanliness.

GP95-004 for 6" x 6" x 0.250"
Mask Handling
Products
Handling Tools for the Electronics Industry