Photomask Handling
Automation & Wafer Handling Tools for the Electronics Industry
  MPS
Photomask
Side Pick

Industry standard antistatic photomask picks handle the mask reticle from the SIDE
tangential edges of the mask to reduce contamination by eliminating direct contact
of mask chrome.. MPS tools are designed with a 15° angle handle allowing for mask
placement into photo process, metrology or storage containers.

Designed for ISO Class 3 (FS209E Class 1)
Antistatic Construction, Chemical Resistant

5 x 5 x 0.090                MPS1-50-014        
6 x 6 x 0.250                SQ21457-25
6 x 6 x 0.250 EUV        MPS3-63AS-002
7 x 7 x 0.120                MPS1-71-001
9 x 9 x 0.120                MPS1-001
Please contact H-Square for additional sizes
  MPH
Photomask
Horizontal Pick

Horizontal antistatic photomask picks handle across the mask, contacting the
tangential edges of the mask to reduce contamination by eliminating direct contact
with the mask chrome area. MPH tools are designed with a 15° angle handle
allowing for mask placement into photo process, metrology or storage containers.

Designed for ISO Class 3 (FS209E Class 1)
Antistatic Construction, Chemical Resistant

5 x 5 x 0.090                MPH151DW-005        
6 x 6 x 0.250                SQ21457-6
7 x 7 x 0.120                MPH172DW-003
9 x 9 x 0.120                MPH3-92AS-003
Please contact H-Square for additional sizes
  SQ21518
Photomask
Nikon Pick

Special 4-gripper horizontal antistatic photomask picks for handling reticles to/from a
Nikon mask cartridge box.  Grippers are positioned to avoid contact with the pellicle
frame (typically loaded into the Nikon cartridge pellicle down).

Designed for ISO Class 3 (FS209E Class 1)
Antistatic Construction, Chemical Resistant

5 x 5 x 0.090                SQ21518-40        
6 x 6 x 0.250                SQ21518-1
6 x 6 x 0.250                SQ21518-16
6 x 6 x 0.250                SQ21518-32
6 x 6 x 0.250                SQ21518-37
6 x 6 x 0.250                SQ21518-42
Please contact H-Square for drawings.Grippers are positioned for pellicle frame
location.
  HMP
Photomask
Mask Pick Holder

An all (EP) electro-polished 304 stainless steel table top holder for storing mask
picks when not being used. The HMP protects the mask grippers from damage and
contamination.

Designed for ISO Class 3 (FS209E Class 1)
Antistatic Construction

1 Mask Pick                 HMP1
3 Mask Picks                HMP3
4 Mask Picks                HMP4
  SMIFPO8-E-002
Automatic RSP200
Reticle Pod Opener

Table-top automatic RSP200 style Reticle SMIF pod opener.  SMIFPO8-E-002
unlocks center SMIF pod mechanism and lifts and stores pod lid, allowing easy
access to the inner photomask.  Simple one button operation to open or close the
pod.

Designed for ISO Class 3
Antistatic Construction

SMIFPO8-E-002
  SMIFMAN8
Manual RSP200
Reticle Pod Opener

Table-top manual RSP200 style Reticle SMIF pod opener.  A simple arm mechanism
unlocks center SMIF pod mechanism allowing for easy release of the pod lid.  A
secondary lid storage area keeps the lid seal clean when removed from the base.  A
simple reverse motion of the arm mechanism closes the pod.

Designed for ISO Class 5
Antistatic Construction

SMIFMAN8
H-Square’s line of photomask picks is the result of years of work with semiconductor companies and mask shops to provide a non-
contaminating secure means of handling photomasks. Picks can reduce contamination by eliminating direct contact of mask by operator’s
hands. With the stringent cleanliness requirements for sub-micron applications today, mask picks have become indispensable. Advanced
materials are incorporated in the designs for ESD-safety control, lower abrasion and less tool maintenance.
Features -  
Tangential edge‐grip only; no front or back face of chrome or pellicle contact.
Minimal moving parts for simple cleaning and low particle generation.
Lightweight, economical and easy‐to‐use with trigger‐type gripping mechanism.
V‐type grippers allow masks with beveled edges to be loaded from flat surfaces.
Antistatic construction for ESD-safety control of the chrome architecture.
  SMIFPO16
Automatic RSP150
Reticle Pod Opener

Table-top automatic RSP150 style reticle SMIF pod opener.  SMIFPO16 unlocks
4-mechanism RSP150 pod mechanism and lifts and stores pod lid, allowing easy
access to the inner mask.  Simple one button operation to open or close the pod.  
Compatible with all industry standard single and multiple stack RSP150 pods.

Designed for ISO Class 3 (FS209E Class 1)
Antistatic Construction

SMIFPO16
  MISC2500-015/016
Bright-light Inspection
Large 24” Box

Table-top automatic on/off motion detection bright light view box.  Light absorbing
matte black anodized finish 24” x 24” x 24” box with 250 Watt pure white halogen
bulb.  Optional yellow filter lens included with shipment. This unit automatically turns
on when motion is detected inside the box; the light turns off after 20 seconds. A
large heat-sink cools the halogen light unit, no fan is required, keeping the
inspection area cleaner. Ideal for photomask or wafer macro inspections.  

Designed for ISO Class 5 (FS209E Class 10)
Wafer sizes to 450mm; Mask sizes to 14” x 14”

110-120VAC                MISC2500-015
220-240VAC                MISC2500-016
  MISC2500-007/018
Bright Light Inspection
Medium 12” Box

Table-top automatic on/off motion detection bright light view box.  Light absorbing
matte black anodized finish 12” x 12” x 12” box with 250 Watt pure white halogen
bulb.  Optional yellow filter lens included with shipment. This unit automatically turns
on when motion is detected inside the box; the light turns off after 20 seconds. A
large heat-sink cools the halogen light unit, no fan is required, keeping the
inspection area cleaner. Ideal for photomask or wafer macro inspections.  

Designed for ISO Class 5 (FS209E Class 10)
Wafer sizes to 200mm; Mask sizes to 7” x 7”

110-120VAC                MISC2500-007
220-240VAC                MISC2500-018
  SMIFMAN6
Manual RSP150
Reticle Pod Opener

Table-top manual RSP150 style reticle SMIF pod opener.  A simple arm mechanism
unlocks center RSP150 pod mechanism allowing for easy release of the pod lid.  A
secondary lid storage area keeps the lid seal clean when removed from the base.  A
simple reverse motion of the arm mechanism closes the pod. Compatible with all
industry standard single and multiple stack RSP150 pods.

Designed for ISO Class 5 (FS209E Class 10)
Antistatic Construction

SMIFMAN6
  PC
Photomask
Cleaning Cassettes

Four-slot fixed handled photomask cleaning cassettes allow for a mask to be
lowered into a wet bench for periodic cleaning requirements. Cassette construction
is PTFE virgin Teflon® with PFA fasteners.  All designs have a MOQ minimum
quantity order of 2 units per order.

Designed for ISO Class 3 (FS209E Class 1)
Thermal environments up to 80°
Chemical Resistant

PC-076                2 slots 6” x 6”, 2 slots 5” x 5”
PC-025                2 slots 7” x 7”, 2 slots 5” x 5”
PC-012                4 slots 7” x 7”
PC-005                4 slots 9” x 9”