H-Square’s complete line of photomask handling tools is the result of years of work with semiconductor companies and mask shops to provide a non-contaminating secure
means of handling reticles.  Mask Picks can reduce contamination by eliminating direct contact of the mask by an operator’s hands. Masks are easily inserted and extracted
from various fixtures and storage containers, and are securely gripped while loaded in the pick. With the stringent cleanliness requirements for sub-micron applications
today, mask picks have become indispensable. In addition to mask picks, H-Square has designs for many support tools for opening and closing reticle pods to PM mask
inspection and cleaning.
Photomask Handling
Copyright © 2017 - H-Square Corporation  Santa Clara, California, USA All Rights Reserved
Automation & Wafer Handling Tools for the Electronics Industry
MISC2500
TABLETOP MACRO BRIGHT LIGHT INSPECTION BOX
Table top bright light reflection containment chamber with a 250 watt halogen full
spectrum light source.  The system includes an integrated automatic on/off motion
sensor switch and an over-sized heatsink to cool the lamp without the need of a
fan. Substrates are manually placed into the black anodized light absorbing
chamber and viewed under the concentrated light source.


MISC2500-007 Brightlight Box 12" x 12" x 12" cavity 120VAC Power
MISC2500-018 Brightlight Box 12" x 12" x 12" cavity 220VAC Power
MISC2500-015 Brightlight Box 24" x 24" x 24" cavity 120VAC Power
MISC2500-016 Brightlight Box 24" x 24" x 24" cavity 220VAC Power
SMIFPO16 AUTOMATIC RSP150 RETICLE SMIF POD OPENER
Semi-automatic RSP150 reticle SMIF pod opener provides easy access to
photomasks stored inside RSP150 cassettes with minimal operator involvement.
Units are compatible with most standard RSP150 pod designs. Smooth, reliable lift
automation for reliability and cleanliness. Class One Cleanroom compatible. ESD
protection insured by static dissipative plastics.

SMIFPO16   RSP150 / MSP150 Opener
SMIFPO8 -
AUTOMATIC RSP200 RETICLE SMIF POD OPENER
Semi-automatic RSP200 reticle SMIF pod opener provides easy access
to photomasks stored inside RSP200 cassettes with minimal operator
involvement.Units are compatible with most standard RSP200 pod
designs. Smooth, reliable lift automation for reliability and cleanliness.
Class One Cleanroom compatible. ESD protection insured by static
dissipative plastics.

SMIFPO8       RSP200 Opener
SMIFMAN8 -
MANUAL RSP200 RETICLE SMIF POD OPENER
Provides clean, easy access to photomasks in any MSP or RSP reticle
storage pod cassette. The SMIFMAN8 allows the operator to manually open
the pod to gain access to the inner mask cassette or tray. Features a clean
storage area for the pod lid to be stored during operator interface and mask
pick holder. All materials are ESD safe.

SMIFMAN8   RSP200 / M2000 Opener
SMIFMAN6 -
MANUAL RSP150 RETICLE SMIF POD OPENER
Provides clean, easy access to photomasks in any MSP or RSP reticle storage pod
cassette. The SMIFMAN6 allows the operator to manually open the pod to gain access
to the inner mask cassette or tray. Features a clean storage area for the pod lid to be
stored during operator interface and mask pick holder. All materials are ESD safe.

SMIFMAN6    RSP150 / MSP150 Opener
MPS Style PHOTOMASK PICKS - SIDE GRIP
MPS1 series mask picks handle the mask reticle from the SIDE tangential
edges of the mask to reduce contamination by eliminating direct contact of
mask with gloved hands. MPS1 versions are directly compatible with most
mask handling operations.  Custom versions are available.

MPS1-50             5" x 5" x 0.090" masks
MPS1-63             6" x 6" x 0.250" masks

ANTISTATIC VERSIONS:
MPS1-50-014    ESD safe  5" x 5" x 0.090"
SQ21457-25      ESD safe  6" x 6" x 0.250"

Please contact H-Square for additional ordering options and part numbers
PC SERIES PTFE TEFLON® PHOTOMASK CLEANING CASSETTES
All PTFE cassettes hold photo masks in a vertical position for easy cleaning
in  various processing baths. Photomask cleaning cassettes are available in
a variety of sizes and either incorporate a handle or wet bench can be
incorporated to lift the mask up to interface.
MPH1
PHOTOMASK PICKS - HORIZONTAL
MPH1 series mask picks handle the mask reticle from the top and bottom
orientation tangential edge to reduce contamination by eliminating direct
contact of mask with gloved hands. MPH1 versions are commonly used to
load masks into metrology and mask cleaning support systems where side
clearances on the MPS1 do not fit.

MPH151DW          5" x 5" x 0.090" masks
MPH163VO          6" x 6" x 0.250" masks

ANTISTATIC VERSIONS:
MPH151DW-005    5" x 5" x 0.090" masks
SQ21457-6            6" x 6" x 0.250" masks

Please contact H-Square for additional ordering options and part numbers
MPH1
PHOTOMASK PICKS - HORIZONTAL 90° GRIP
MPH1 90 series mask picks handle the mask reticle from the top and
bottom orientation tangential edge eliminating direct contact of mask
with gloved hands. The handle is 90 degrees perpendicular orientation
for placing a mask down into a cavity, like a cleaning station.

MPH90151DW           5" x 5" x 0.090" masks
MPH90163VO           6" x 6" x 0.250" masks

ANTISTATIC VERSIONS:
MPH90151DW-005   5" x 5" x 0.090" masks
SQ21457                     6" x 6" x 0.250" masks

Please contact H-Square for additional MPH90° part numbers and
options
SQ21518
NIKON STEPPER MASK PICKS
Mask picks reduce contamination by eliminating direct contact of mask with
hands. The four gripper horizontal offset SQ21518 mask pick is designed to
load and unload masks from a NIKON Stepper mask cartridge. Picks are
lightweight, economical and easy to use. Many designs feature a locking latch
trigger to safe guard the premature release of a valuable photomask. All
designs are ESD safe (antistatic).

SQ21518-40       5"x5"x0.090" masks
SQ21518-16       6" x 6" x 0.250" masks

Please contact H-Square for additional options and ordering part numbers.

For this mask pick knowledge of the location of any pellicle frame is required.
MPV -
MASK PICKS - VERTICAL
Mask picks reduce contamination by eliminating direct contact of mask with
hands. The MPV series mask pick provides a means to lift a mask from a vertical
position like a photomask cassette. Picks are lightweight, economical and easy
to use ESD safe versions available. Custom designs with special angles,
customized grippers, locking triggers, custom materials or other non-standard
features are also
available.

MPV1-4         4" x 4" masks
MPV1-5        5" x 5" masks
MPV1-6          6" x 6" masks

ANTISTATIC VERSIONS:
SQ21457-4   6" x 6" masks

Please contact H-Square for additional MPV part numbers.
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